Micromachined Fluidic Couplers
نویسندگان
چکیده
A family of self-aligning micromachined fluidic couplers are presented here. Bulk micromachined and DRIE processed silicon structures have been investigated as a means of providing external connections via fused silica capillaries for MEMS fluidic devices. These couplings can have arbitrary geometry, ensuring compatibility with most fluidic ports. In addition, performance exceeds typical requirements with an operating range of at least 01200 psi.
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